Semiconductor OEM Products

The products listed below are specially designed for use in semiconductor fabrication equipment ("tools") manufactured by GaSonics (Novellus), Axcelis, Applied Materials and other OEMs. Although these products can be used for other applications, GAE offers a complete line of standard products that may be more suitable and cost effective for general purposes. Please visit the Products page and scroll through the list of product groups, and feel free to contact GAE for assistance with product selection.

Microwave Generators

GAE P/N	Description	Equiv. P/N	Used On	Magnetron
912419	1.25kW OEM Generator (Front Access) *	n/a	L-3510	910443 (C12139)
911213	1.25kW OEM Generator	C13170 94-2618	PEP	910443 (C12139)
911665	1.8kW High Voltage Power Supply	D13765	Iridia	n/a

* Recommended for all new tools and field replacements of the OEM-C12935.

Magnetrons

GAE P/N	Power	Used In	Equiv. P/N	Cooling	Freq
911465	1.45 kW	95-3014	60-2011 NL10254-16	Water	2.45 GHz
911465-1	1.45 kW	95-2665	95-0502 NL10254-6
910443	1.9 kW	C12935	C12139 73797-06 NL10250-9
911297	3 kW	SmartPower^TM	C13733
910904	3.5 kW	D13449	AG9131A
911513	1.9 kW	Iridia	60-2025 NL10250-17
911550	1.45 kW	Aura, PRSP	NL10254-4
912322	1.9 kW	Axcelis	319371 NL10250-20
911147	2 kW	PEP+	60-2043 05-162425-00

Waveguide Components

GAE P/N	Description	Equiv. P/N	Used On
912224	Offset Waveguide with Coupler (solder construction) *	n/a	L-3510
910272	Offset Waveguide with Coupler (epoxy construction)	C12519 17692-01	L-3510
912803	Precision 3-Stub Tuner, CPR284	n/a	L-3510 PEP, PEP+
910303	Dual Coupler E-Bend, CPR284	94-3114	PEP+
910406	Dummy Load with Coupler, CPR284	60-2032	PEP+

* Recommended for all new tools and field replacements.

Spare Parts and Accessories

GAE P/N	Description	Equiv. P/N	Used On
910923	Control PCB Assy, Top Access	C12132 73797-04	912419 (L-3510) C13170 (PEP) D13765 (Iridia)
910923-1	Control PCB Assy, Side Access	C12132-1 73797-23	C12935 (L-3510)
911214	SCR Power Board Assy	C12294 73797-05	All above
910441	Plate Transformer	C12254 73797-20	912419 (L-3510) C12935 (L-3510) C13170 (PEP)
910442	Filament Transformer	C12872 60-1016	All above

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