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3-Port Circulators
A unique and cost effective service performed exclusively by GAE is the repair and refurbishment of 3-port circulators. Most failures are due to arcing or water leaks and can be repaired at roughly half the cost of a new circulator. Most WR284 models manufactured by Genesys Systems, Gerling Moore, Gerling Laboratories (AGL), Merrimac and Waveline are repairable. |
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Dual Directional
Couplers In addition to circulator repair, GAE offers directional waveguide coupler calibration services using equipment calibrated to and methods consistent with NIST standards. This service applies to almost all couplers in WR284, WR340 and WR430 waveguide. Couplers manufactured by Genesys Systems, Gerling Moore, Gerling Laboratories (AGL) and GAE are also repairable. |
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Equipment
Repair and Refurbishment |
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Since our inception in 1997, GAE has been a key
supplier of products and services relating to
microwave heating equipment for the semiconductor
industry. Our expertise in microwave
generators and waveguide components is well
recognized by semiconductor OEMs through the
services we provide for microwave equipment
manufacturing, refurbishment, testing and
calibration.
All repairs and refurbishments performed by GAE
include a complete functional performance
verification to original factory specifications,
with comprehensive test data provided to the
customer. GAE maintains an inventory of
magnetrons and other components used in magnetron
heads to ensure the fastest possible delivery. And GAE provides the same warrantee on all repairs
and refurbishments as provided to you by the
original manufacturer. You can be assured of
no change in your process, and the savings in
maintenance costs you will realize are indeed
significant!
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OEM
Generators and HV Power Supplies
Many of the
microwave generators and power supplies used in GaSonics (now
part of Novellus) etchers and ashers are
among the "GL139" family of products made
by ASTeX and it's former subsidiary AGL (ASTeX/Gerling
Labs). GAE's background with these
products allows us to provide ongoing
service and support at a level that far
exceeds the capabilities of ANY other
company today. Services range from
simple calibration and alignment to complete
repair and refurbishment, with guaranteed
performance and reliability. |
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GAE also offers
users of these products the capability to
perform their own diagnostics to help
determine the cause of failure and
disposition the unit for repair. Once the
failure cause is found, GAE can provide new
and/or refurbished replacements for any part
in any of the GL139 style units. See the
section on
Test Equipment under
Instrumentation in the
Products
listing. |
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Magnetron
Heads
A recent addition to our list of services is the
repair and refurbishment of magnetron heads manufactured by ASTeX and
its former subsidiary, ASTeX/Gerling Laboratories (AGL). These
magnetron heads are used in wafer fab tools manufactured by Applied
Materials, Lam Research and others. The photographs below illustrate the two
most commonly used models. |
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3.5 kW Magnetron Head (ASTeX p/n D13449)
6 kW Magnetron Head (ASTeX p/n D13614)
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